Domestic 8-inch R&D pilot line process capability layout

On September 10th, at the opening ceremony of the 2017 China (Shanghai) International Sensor Technology and Application Exhibition (SENSOR CHINA) and the 2017 Global Sensor and Internet of Things Industry Summit in Asia's highest specification sensor and IoT industry event Many academicians and many industry leaders gathered together, Vice Chairman of the Chinese Association for Science and Technology, Academician of the Chinese Academy of Sciences, Wang Xue, former Vice Minister of the Ministry of Industry and Information Technology, Yang Xueshan, General Manager of the National Integrated Circuit Industry Investment Fund, Chairman of the China High-end Chip Alliance, Ding Wenwu, Vice Chairman of the Electronics Department of the Ministry of Industry and Information Technology Director Wu Shengwu, Director of Shanghai Science and Technology Committee Shou Ziqi, and Secretary of Shanghai Jiading District Party Committee Ma Chunlei jointly launched the Shanghai Microtechnical Industry Research Institute “Beyond Moore” R&D pilot line operation. Since then, the first domestic, world-leading, CMOS-compatible 8-inch R&D pilot test line, built by Shanghai Micro-Technology Industry Research Institute (hereinafter referred to as “工工院”), has officially voiced the industry to create a complete “transcendence of Moore in China”. On the basis of the industrial chain, it aims to further promote the rapid development of China's “Beyond Moore” technology and the innovation application of the Internet of Things, leading the world.

Figure 1 ITRI's “Beyond Moore” 8-inch R&D pilot line ribbon-cutting ceremony to improve the domestic eco-chain layout beyond the Moore industry, 8-inch R&D pilot test line assists innovation research and development , with mobile Internet, Internet of Things, cloud computing, big data, The information technology represented by artificial intelligence is accelerating innovation, integration and popularization. An era of intelligent Internet of Everything is coming. Among them, Beyond Moore Technology takes sensors as the core and combines technologies such as radio frequency, power and micro energy, which is one of the fundamental and decisive core technologies for realizing the interconnection of all things in the future. In fact, the market application of sensors has shown explosive growth, with a wide variety of products, up to thousands. After the MEMS Bryzek forecasted MEMS chip market in the United States will reach a market scale of 1 trillion in 2023, China's smart sensor market is also expected to reach 96 billion yuan in 2019. However, looking at China's current situation beyond the Moore field, although it has accumulated many years of theoretical research and technical verification, it has accumulated a lot of valuable knowledge and experience, but when it is actually put into the product for practical application, there is often a disconnection from the production platform. This is due to the long technology chain involved in the development of MEMS products, and its "non-standard" characteristics make its R & D and innovation needs a long run-in period with the production line, unlike the standard process of CMOS, Said to be "seriously dependent" on the production line. The pilot test is a must-have stage. It is a common challenge faced by domestic sensor manufacturers. According to statistics, the scientific and technological achievements have passed the pilot test, and the industrialization success rate can reach 80%. The success rate of the pilot test is only 30%. Based on this background, ITRI is based in Shanghai, which has the domestic first-class integrated circuit R&D and industrial base, and is committed to surpassing the Moore plan and strive to be parallel with the international leading level in this field. Landing in Shanghai Jiading Industrial Zone, nearly 5,000 square meters of high-grade micro-nano processing ultra-clean factory, ITRI and the international leading fabs closely cooperate to build an 8-inch "Beyond Moore" R&D pilot line, not only realized The seamless connection between R&D and mass production has enriched and completed the domestic transcendence of the Moore eco-chain, which is a key link in the competition of the international industry.

Figure 2 SITRI 8-inch R&D pilot line process capability layout At present, in the “Beyond Moore” field, compared to the 6-inch production line commonly used in the industry, the SITRI 8-inch line from R&D to mass production is recognized. Leading technology. It is reported that the 8-inch R&D pilot line will focus on the development of “Beyond Moore” sensor product technology, which can comprehensively develop surface, volume, 3D micro-nano processing and new processes, new devices and new systems, and according to “Beyond Moore” Product and technical features deployed MEMS, silicon photonics, RF, silicon-based III-V, 3D integration, MR magnetic sensing, power and biology and other related processes and measurement equipment. As the first advanced 8-inch R&D pilot test line in China, SITRI's 8-inch R&D pilot test line can not only undertake product development, small batch production, technical training, equipment verification and other services, but also help to improve the success rate of R&D. Helping to achieve a seamless transition from R&D to mass production of “Beyond Moore” products and technologies. ITRI's integrated functional platform will accelerate the process of innovation and industrialization in the field of “Beyond Moore”

Figure 3 SITRI is committed to building a “Beyond Moore” industry innovation ecosystem. The world's leading “Beyond Moore” 8-inch R&D pilot line is the fulcrum. ITRI is trying to create an integrated functional platform integrating R&D, engineering, marketing and incubation. Innovative companies and partners provide a full range of services and solutions: - In the R&D innovation phase: ITRI has established the country's first mature and complete MEMS-IC software design platform, developing MEMS-ICIP core library; nearly 5,000 square meters The advanced "Beyond Moore" R&D 8-inch R&D pilot line will focus on the development and integration of new processes, new materials and new devices; while providing integrated circuit design, system integration and complete IoT system solutions; Pilot manufacturing process: ITRI establishes the world's leading 8-inch MtM R&D pilot test line, world-class engineering test and analysis platform, MEMS/ASIC wafer test, package test and other test capabilities; provides complete patent and device analysis and research Services and provide expert guidance on intellectual property licensing, protection and negotiation; - In the field of industrial integration: ITRI will enter Step by step, such as automotive electronics, smart healthcare, smart security, smart home, smart consumer products, and other sub-networks and sensor industries to integrate vertical industry chain and horizontal service market, promote the rapid development of related industries; initiate and participate For example, China Sensors and the Internet of Things Industry Alliance, the “Beyond Moore” Industrial Technology Innovation Alliance and other industrial alliances will promote the development of key standards for “Beyond Moore” and the Internet of Things industry, and provide global coverage through exhibitions and series of events such as SENSOR CHINA. Market support; - Building a global innovation network: ITRI establishes branches in Silicon Valley, Grenoble, France, Hsinchu, Taiwan, etc., and deploys innovative networks on a global scale; - Investment Funds and Incubation Accelerators: by ITRI The National Integrated Circuit Industry Investment Fund and other strategic investors jointly initiated the establishment of a “Better Moore” industry fund with a scale of 5 billion yuan to provide key early support for innovative enterprises; and a global innovation network to provide a combination of software and hardware incubation services. . In short, relying on the strong technical support of the 8-inch line, supported by investment funds and incubator accelerators, ITRI is committed to investing and incubating the “Beyond Moore” field and the IoT industry start-up team to optimize the allocation of industrial resources and funds. Accelerate technology research and development and business incubation, and deploy innovative networks on a global scale to truly create an industry innovation ecosystem that “beyond Moore”. About SITRI: The Shanghai Microtechnology Industry Research Institute is committed to the innovation and industrialization of “Beyond Moore” technology and IoT applications. As a global collaborative innovation center, Shanghai Micro-Technology Institute integrates R&D, engineering and incubation to provide a full range of services and solutions for innovative companies and partners. At present, Shanghai Micro-Technology Institute has established close cooperative relations with many domestic and foreign production, learning and research organizations to achieve high-efficiency industrialization of innovation achievements and accelerate the establishment of an ecosystem beyond “Moore beyond” technology and the Internet of Things.